JPH0374178B2 - - Google Patents

Info

Publication number
JPH0374178B2
JPH0374178B2 JP59032982A JP3298284A JPH0374178B2 JP H0374178 B2 JPH0374178 B2 JP H0374178B2 JP 59032982 A JP59032982 A JP 59032982A JP 3298284 A JP3298284 A JP 3298284A JP H0374178 B2 JPH0374178 B2 JP H0374178B2
Authority
JP
Japan
Prior art keywords
film
membrane
mask
pellicle
present
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59032982A
Other languages
English (en)
Japanese (ja)
Other versions
JPS60176751A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP59032982A priority Critical patent/JPS60176751A/ja
Publication of JPS60176751A publication Critical patent/JPS60176751A/ja
Publication of JPH0374178B2 publication Critical patent/JPH0374178B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Laminated Bodies (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP59032982A 1984-02-23 1984-02-23 マスク Granted JPS60176751A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59032982A JPS60176751A (ja) 1984-02-23 1984-02-23 マスク

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59032982A JPS60176751A (ja) 1984-02-23 1984-02-23 マスク

Publications (2)

Publication Number Publication Date
JPS60176751A JPS60176751A (ja) 1985-09-10
JPH0374178B2 true JPH0374178B2 (en]) 1991-11-26

Family

ID=12374081

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59032982A Granted JPS60176751A (ja) 1984-02-23 1984-02-23 マスク

Country Status (1)

Country Link
JP (1) JPS60176751A (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH066504Y2 (ja) * 1987-05-20 1994-02-16 大日本印刷株式会社 Ｘ線露光用マスク
JPH02310A (ja) * 1987-12-29 1990-01-05 Canon Inc Ｘ線用マスクとそれを用いた露光方法
JPH02309A (ja) * 1987-12-29 1990-01-05 Canon Inc Ｘ線用マスクとそれをを用いた露光方法
JPH0652648A (ja) * 1992-07-29 1994-02-25 Mitsubishi Kasei Corp 光記録媒体用カートリッジ

Also Published As

Publication number Publication date
JPS60176751A (ja) 1985-09-10

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term